Assignee
ZEISS CARL SMT LTD
GB·6 granted patents·68 citations·filing 2002–2007
Top patents by PatentIndex Score
6 records- 0187US7348557B2Scanning particle beam instrumentZEISS CARL SMT LTD·Filed 2005·Granted Mar 25, 2008·47 cites·21 claims
- 0267US7925284B2Charged particle beam deviceZEISS CARL SMT LTD·Filed 2007·Granted Apr 12, 2011·7 cites·34 claims
- 0367US6943352B2Particle detectorsZEISS CARL SMT LTD·Filed 2004·Granted Sep 13, 2005·7 cites·11 claims
- 0458US7186976B2Scanning electron microscopeZEISS CARL SMT LTD·Filed 2002·Granted Mar 6, 2007·7 cites·39 claims
- 0548US7777195B2Charged particle beam instrument and method of detecting charged particlesZEISS CARL SMT LTD·Filed 2007·Granted Aug 17, 2010·0 cites·18 claims
- 0632US7317350B2Transresistance amplifier for a charged particle detectorZEISS CARL SMT LTD·Filed 2003·Granted Jan 8, 2008·0 cites·20 claims
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