Assignee
ZEUS CO LTD
KR·21 granted patents·13 pending applications·6 citations·filing 2015–2025
Top patents by PatentIndex Score
34 records- 0189US11901214B2Wafer processing apparatus and method of controlling the sameZEUS CO LTD·Filed 2022·Granted Feb 13, 2024·2 cites·20 claims
- 0287US11915965B2Wafer processing methodZEUS CO LTD·Filed 2022·Granted Feb 27, 2024·2 cites·7 claims
- 0376US12568799B2Wafer processing apparatus and wafer processing methodZEUS CO LTD·Filed 2023·Granted Mar 3, 2026·0 cites·8 claims
- 0472US10741716B2Wire processing apparatus and method for tabbing apparatusZEUS CO LTD·Filed 2017·Granted Aug 11, 2020·2 cites·19 claims
- 0568US2025233011A1Wafer processing apparatus and wafer processing methodZEUS CO LTD·Filed 2025·Application pending·0 cites
- 0667US11901212B2Wafer processing apparatus and wafer processing methodZEUS CO LTD·Filed 2021·Granted Feb 13, 2024·0 cites·12 claims
- 0767US2025062154A1Wafer cleaning apparatus and method of controlling the sameZEUS CO LTD·Filed 2024·Application pending·0 cites
- 0866US12293938B2Wafer processing apparatus and wafer processing methodZEUS CO LTD·Filed 2021·Granted May 6, 2025·0 cites·14 claims
- 0964US12154819B2Wafer cleaning apparatus and method of controlling the sameZEUS CO LTD·Filed 2022·Granted Nov 26, 2024·0 cites·10 claims
- 1063US2024429069A1Etching device and etching method thereofZEUS CO LTD·Filed 2024·Application pending·0 cites
- 1159US2026001312A1Substrate separation apparatus and control method thereofZEUS CO LTD·Filed 2025·Application pending·0 cites
- 1258US11674875B2Fluid medium monitoring apparatusZEUS CO LTD·Filed 2020·Granted Jun 13, 2023·0 cites·12 claims
- 1357US12013327B2Flow cell deviceZEUS CO LTD·Filed 2020·Granted Jun 18, 2024·0 cites·6 claims
- 1456US12140505B2Wafer processing apparatus and control method thereofZEUS CO LTD·Filed 2021·Granted Nov 12, 2024·0 cites·20 claims
- 1555US12322607B2Wafer processing apparatus and wafer processing methodZEUS CO LTD·Filed 2022·Granted Jun 3, 2025·0 cites·10 claims
- 1655US12074054B2Wafer processing apparatus and wafer processing methodZEUS CO LTD·Filed 2021·Granted Aug 27, 2024·0 cites·8 claims
- 1754US12544806B2Wafer cleaning apparatusZEUS CO LTD·Filed 2023·Granted Feb 10, 2026·0 cites·18 claims
- 1854US12341052B2Wafer cleaning apparatusZEUS CO LTD·Filed 2022·Granted Jun 24, 2025·0 cites·18 claims
- 1954US12261076B2Wafer processing apparatus and wafer processing methodZEUS CO LTD·Filed 2022·Granted Mar 25, 2025·0 cites·20 claims
- 2053US2023166280A1Fluid spray device for processing substrateZEUS CO LTD·Filed 2022·Application pending·0 cites
- 2150US12532697B2Etching device and etching method thereofZEUS CO LTD·Filed 2020·Granted Jan 20, 2026·0 cites·10 claims
- 2250US11749557B2Wafer processing apparatusZEUS CO LTD·Filed 2021·Granted Sep 5, 2023·0 cites·14 claims
- 2347US2023048466A1Wafer processing methodZEUS CO LTD·Filed 2022·Application pending·0 cites
- 2447US2021296140A1Double tube structure flow cell apparatusZEUS CO LTD·Filed 2021·Application pending·0 cites
- 2545US2021080454A1Quantum dot bead having multifunctional ligand, and target antigen detection method and bio-diagnostic apparatus using sameZEUS CO LTD·Filed 2019·Application pending·0 cites
- 2645US2021072239A1Biosensor comprising linker material and quantum dot beads, and target antigen detection method using sameZEUS CO LTD·Filed 2019·Application pending·0 cites
- 2742US10424688B2Wire transfer apparatus of tabbing apparatusZEUS CO LTD·Filed 2015·Granted Sep 24, 2019·0 cites·12 claims
- 2840US10319874B2Wire setting apparatus of tabbing apparatus and wire setting method using sameZEUS CO LTD·Filed 2015·Granted Jun 11, 2019·0 cites·17 claims
- 2939US2023011890A1Etching apparatus and method of controlling sameZEUS CO LTD·Filed 2022·Application pending·0 cites
- 3039US2023008074A1Etching apparatus and method of controlling sameZEUS CO LTD·Filed 2022·Application pending·0 cites
- 3136US12036671B2Actuator module with torque output controlZEUS CO LTD·Filed 2021·Granted Jul 16, 2024·0 cites·14 claims
- 3230US10190913B2Substrate processing apparatus and methodZEUS CO LTD·Filed 2015·Granted Jan 29, 2019·0 cites·12 claims
- 3322US2017221730A1Substrate processing heater device and substrate solution processing device having sameZEUS CO LTD·Filed 2015·Application pending·0 cites
- 3415US2018138059A1Substrate liquid processing apparatus and methodZEUS CO LTD·Filed 2016·Application pending·0 cites
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