Assignee
ZHANG JIMIN
US·8 granted patents·5 pending applications·20 citations·filing 2006–2012
Top patents by PatentIndex Score
13 records- 0184US8157614B2Method of making and apparatus having windowless polishing pad and protected fiberZHANG JIMIN·Filed 2009·Granted Apr 17, 2012·8 cites·21 claims
- 0281US8860932B2Detection of layer clearing using spectral monitoringZHANG JIMIN·Filed 2011·Granted Oct 14, 2014·5 cites·21 claims
- 0370US9248544B2Endpoint detection during polishing using integrated differential intensityZHANG JIMIN·Filed 2012·Granted Feb 2, 2016·2 cites·15 claims
- 0470US8616935B2Control of overpolishing of multiple substrates on the same platen in chemical mechanical polishingZHANG JIMIN·Filed 2010·Granted Dec 31, 2013·2 cites·20 claims
- 0566US8295967B2Endpoint control of multiple-wafer chemical mechanical polishingZHANG JIMIN·Filed 2008·Granted Oct 23, 2012·3 cites·25 claims
- 0656US8465342B2Method of making and apparatus having windowless polishing pad and protected fiberZHANG JIMIN·Filed 2012·Granted Jun 18, 2013·0 cites·11 claims
- 0753US9296084B2Polishing control using weighting with default sequenceZHANG JIMIN·Filed 2012·Granted Mar 29, 2016·0 cites·18 claims
- 0850US2007194658A1Systems and methods for performing acoustic hemostasis of deep bleeding trauma in limbsZHANG JIMIN·Filed 2006·Application pending·0 cites
- 0946US8755928B2Automatic selection of reference spectra libraryZHANG JIMIN·Filed 2011·Granted Jun 17, 2014·0 cites·21 claims
- 1045US2014024293A1Control Of Overpolishing Of Multiple Substrates On the Same Platen In Chemical Mechanical PolishingZHANG JIMIN·Filed 2012·Application pending·0 cites
- 1144US2012100781A1Multiple matching reference spectra for in-situ optical monitoringZHANG JIMIN·Filed 2011·Application pending·0 cites
- 1243US2014030956A1Control of polishing of multiple substrates on the same platen in chemical mechanical polishingZHANG JIMIN·Filed 2012·Application pending·0 cites
- 1342US2012034844A1Spectrographic monitoring using index tracking after detection of layer clearingZHANG JIMIN·Filed 2010·Application pending·0 cites
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