Assignee
ZHOU TIANSHENG
CA·10 granted patents·1 pending application·88 citations·filing 2007–2020
Top patents by PatentIndex Score
11 records- 0194US8165323B2Monolithic capacitive transducerZHOU TIANSHENG·Filed 2007·Granted Apr 24, 2012·49 cites·22 claims
- 0288US9036231B2Micro-electro-mechanical systems micromirrors and micromirror arraysZHOU TIANSHENG·Filed 2011·Granted May 19, 2015·11 cites·30 claims
- 0384US10551613B2Micro-electro-mechanical systems micromirrors and micromirror arraysZHOU TIANSHENG·Filed 2015·Granted Feb 4, 2020·2 cites·26 claims
- 0484US8238018B2MEMS micromirror and micromirror arrayZHOU TIANSHENG·Filed 2010·Granted Aug 7, 2012·6 cites·23 claims
- 0583US8472105B2MEMS micromirror and micromirror arrayZHOU TIANSHENG·Filed 2012·Granted Jun 25, 2013·5 cites·12 claims
- 0681US7911672B2Micro-electro-mechanical-system micromirrors for high fill factor arrays and method thereforeZHOU TIANSHENG·Filed 2007·Granted Mar 22, 2011·12 cites·20 claims
- 0775US8389349B2Method of manufacturing a capacitive transducerZHOU TIANSHENG·Filed 2012·Granted Mar 5, 2013·2 cites·8 claims
- 0871US11567312B2Micro-electro-mechanical systems micromirrors and micromirror arraysZHOU TIANSHENG·Filed 2020·Granted Jan 31, 2023·0 cites·22 claims
- 0965US9086571B2MEMS optical deviceZHOU TIANSHENG·Filed 2013·Granted Jul 21, 2015·1 cites·23 claims
- 1045US9385634B2Rotational type of MEMS electrostatic actuatorZHOU TIANSHENG·Filed 2013·Granted Jul 5, 2016·0 cites·39 claims
- 1140US2008289429A1Fiber optic mems seismic sensor with mass supported by hinged beamsZHOU TIANSHENG·Filed 2007·Application pending·0 cites
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