Assignee

ZUKOTYNSKI STEFAN

CA·1 granted patent·42 citations·filing 1990–1990

Technology mixH01J1

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1 record

0171US5039376AMethod and apparatus for the plasma etching, substrate cleaning, or deposition of materials by D.C. glow dischargeZUKOTYNSKI STEFAN·Filed 1990·Granted Aug 13, 1991·42 cites·24 claims

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