Inventor
SELYUTIN LEONID
US15 patents
Patents
15 patentsUS6179924B1Jan 30, 2001
Heater for use in substrate processing apparatus to deposit tungsten
APPLIED MATERIALS INC324 citations99
US6099651AAug 8, 2000
Temperature controlled chamber liner
APPLIED MATERIALS INC360 citations99
US6056823AMay 2, 2000
Temperature controlled gas feedthrough
APPLIED MATERIALS INC167 citations99
US6035101AMar 7, 2000
High temperature multi-layered alloy heater assembly and related methods
APPLIED MATERIALS INC963 citations99
US5951776ASep 14, 1999
Self aligning lift mechanism
APPLIED MATERIALS INC273 citations99
US6258170B1Jul 10, 2001
Vaporization and deposition apparatus
APPLIED MATERIALS INC307 citations98
US6189482B1Feb 20, 2001
High temperature, high flow rate chemical vapor deposition apparatus and related methods
APPLIED MATERIALS INC447 citations98
US6120609ASep 19, 2000
Self-aligning lift mechanism
APPLIED MATERIALS INC104 citations98
US5968379AOct 19, 1999
High temperature ceramic heater assembly with RF capability and related methods
APPLIED MATERIALS INC262 citations98
US6527865B1Mar 4, 2003
Temperature controlled gas feedthrough
APPLIED MATERIALS INC89 citations97
US6464795B1Oct 15, 2002
Substrate support member for a processing chamber
APPLIED MATERIALS INC98 citations97
US6165271ADec 26, 2000
Temperature controlled process and chamber lid
APPLIED MATERIALS INC49 citations96
US6063199AMay 16, 2000
Temperature controlled liner
APPLIED MATERIALS INC23 citations96
US5994678ANov 30, 1999
Apparatus for ceramic pedestal and metal shaft assembly
APPLIED MATERIALS INC89 citations95
US6123773ASep 26, 2000
Gas manifold
APPLIED MATERIALS INC10 citations82