Inventor
NAGLE STEVEN F
US8 patents
⚠️ This page may combine multiple inventors who share the name “NAGLE STEVEN F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXSUN TECH INC
4 patentsUS7208333B2Apr 24, 2007
Process for fabricating MEMS membrane with integral mirror/lens
AXSUN TECH INC130 citations98
US6643075B2Nov 4, 2003
Reentrant-walled optical system template and process for optical system fabrication using same
AXSUN TECH INC18 citations84
US6790698B2Sep 14, 2004
Process for integrating dielectric optical coatings into micro-electromechanical devices
AXSUN TECH INC17 citations83
US6768756B2Jul 27, 2004
MEMS membrane with integral mirror/lens
AXSUN TECH INC8 citations73