Inventor
ISHIDA SEIKI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “ISHIDA SEIKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
9 patentsUS7809460B2Oct 5, 2010
Coating and developing apparatus, coating and developing method and storage medium in which a computer-readable program is stored
TOKYO ELECTRON LTD11 citations83
US7563042B2Jul 21, 2009
Substrate carrying apparatus, substrate carrying method, and coating and developing apparatus
TOKYO ELECTRON LTD16 citations83
US6579370B2Jun 17, 2003
Apparatus and method for coating treatment
TOKYO ELECTRON LTD17 citations83
US8033244B2Oct 11, 2011
Substrate processing system
TOKYO ELECTRON LTD12 citations82
US10553421B2Feb 4, 2020
Substrate processing apparatus, substrate processing method and storage medium
TOKYO ELECTRON LTD6 citations69
US6620245B2Sep 16, 2003
Liquid coating apparatus with temperature controlling manifold
TOKYO ELECTRON LTD12 citations69
US7284917B2Oct 23, 2007
Coating and developing system and coating and developing method
TOKYO ELECTRON LTD5 citations62
US9889476B2Feb 13, 2018
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD1 citations51
US10290518B2May 14, 2019
Substrate liquid processing apparatus
TOKYO ELECTRON LTD0 citations39
ISHIDA SEIKI
4 patentsUS8154106B2Apr 10, 2012
Coating and developing system and coating and developing method
ISHIDA SEIKI17 citations91
US8443513B2May 21, 2013
Substrate processing apparatus
ISHIDA SEIKI28 citations89
US9052610B2Jun 9, 2015
Coating and developing system and coating and developing method
ISHIDA SEIKI2 citations61
US8303232B2Nov 6, 2012
Substrate processing system
ISHIDA SEIKI5 citations60