Inventor
YAMARTINO JOHN M
US8 patents
⚠️ This page may combine multiple inventors who share the name “YAMARTINO JOHN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS6673199B1Jan 6, 2004
Shaping a plasma with a magnetic field to control etch rate uniformity
APPLIED MATERIALS INC107 citations97
US6569775B1May 27, 2003
Method for enhancing plasma processing performance
APPLIED MATERIALS INC28 citations92
US6566272B2May 20, 2003
Method for providing pulsed plasma during a portion of a semiconductor wafer process
APPLIED MATERIALS INC14 citations83
US7624003B2Nov 24, 2009
Split-phase chamber modeling for chamber matching and fault detection
APPLIED MATERIALS INC11 citations82
US6635577B1Oct 21, 2003
Method for reducing topography dependent charging effects in a plasma enhanced semiconductor wafer processing system
APPLIED MATERIALS INC8 citations69