Inventor
SHINOHARA TOSHIKUNI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “SHINOHARA TOSHIKUNI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
8 patentsUS6255731B1Jul 3, 2001
SOI bonding structure
CANON KK179 citations98
US6258244B1Jul 10, 2001
Treating method and apparatus utilizing chemical reaction
CANON KK19 citations92
US6829279B1Dec 7, 2004
Laser oscillating apparatus, exposure apparatus using the same and device fabrication method
CANON KK13 citations84
US6804285B2Oct 12, 2004
Gas supply path structure for a gas laser
CANON KK6 citations74
US6744802B1Jun 1, 2004
Laser oscillating apparatus with slotted waveguide
CANON KK8 citations74
US6650678B1Nov 18, 2003
Laser oscillating apparatus
CANON KK5 citations63
US6801554B1Oct 5, 2004
Laser oscillating apparatus, exposure apparatus, and device fabrication method
CANON KK1 citations52
US6847672B2Jan 25, 2005
Laser gas supply path structure in an exposure apparatus
CANON KK0 citations49