Inventor
SCHELLHORN UWE
DE10 patents
⚠️ This page may combine multiple inventors who share the name “SCHELLHORN UWE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
5 patentsUS6816247B1Nov 9, 2004
Moiré method and a system for measuring the distortion of an optical imaging system
ZEISS CARL SMT AG36 citations87
US7408652B2Aug 5, 2008
Device and method for the optical measurement of an optical system by using an immersion fluid
ZEISS CARL SMT AG12 citations81
US7019824B2Mar 28, 2006
Moire method and measuring system for measuring the distortion of an optical imaging system
ZEISS CARL SMT AG11 citations81
US7119910B1Oct 10, 2006
Phase shifting wavefront interference method
ZEISS CARL SMT AG2 citations61
US7400388B2Jul 15, 2008
Method for determining distortion and/or image surface
ZEISS CARL SMT AG3 citations59
ZEISS CARL SMT GMBH
2 patentsUS8988752B2Mar 24, 2015
Beam control apparatus for an illumination beam and metrology system comprising an optical system containing such a beam control apparatus
ZEISS CARL SMT GMBH4 citations68
US8836929B2Sep 16, 2014
Device and method for the optical measurement of an optical system by using an immersion fluid
ZEISS CARL SMT GMBH0 citations51