Inventor
MEUCHEL CRAIG P
US10 patents
⚠️ This page may combine multiple inventors who share the name “MEUCHEL CRAIG P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMITOOL INC
9 patentsUS6286231B1Sep 11, 2001
Method and apparatus for high-pressure wafer processing and drying
SEMITOOL INC178 citations97
US5658387AAug 19, 1997
Semiconductor processing spray coating apparatus
SEMITOOL INC108 citations97
US6357142B1Mar 19, 2002
Method and apparatus for high-pressure wafer processing and drying
SEMITOOL INC43 citations95
US7138016B2Nov 21, 2006
Semiconductor processing apparatus
SEMITOOL INC31 citations92
US6488038B1Dec 3, 2002
Method for cleaning semiconductor substrates
SEMITOOL INC27 citations92
US6066575AMay 23, 2000
Semiconductor processing spray coating apparatus
SEMITOOL INC34 citations92
US6745494B2Jun 8, 2004
Method and apparatus for processing wafers under pressure
SEMITOOL INC21 citations91
US6543156B2Apr 8, 2003
Method and apparatus for high-pressure wafer processing and drying
SEMITOOL INC14 citations91
US7094291B2Aug 22, 2006
Semiconductor processing apparatus
SEMITOOL INC5 citations73