Inventor

QUACH DAVID

US3 patents

⚠️ This page may combine multiple inventors who share the name “QUACH DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US7431585B2Oct 7, 2008

Apparatus and method for heating substrates

APPLIED MATERIALS INC14 citations83

US7381052B2Jun 3, 2008

Apparatus and method for heating substrates

APPLIED MATERIALS INC14 citations83

SOKUDO CO LTD

1 patent

US7460972B2Dec 2, 2008

Methods and systems for performing real-time wireless temperature measurement for semiconductor substrates

SOKUDO CO LTD6 citations57