Inventor
LEE SUNG-KWON
KR72 patents
⚠️ This page may combine multiple inventors who share the name “LEE SUNG-KWON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HYNIX SEMICONDUCTOR INC
43 patentsUS7365000B2Apr 29, 2008
Method for fabricating semiconductor device
HYNIX SEMICONDUCTOR INC19 citations93
US7196004B2Mar 27, 2007
Method and fabricating semiconductor device
HYNIX SEMICONDUCTOR INC19 citations93
US6995056B2Feb 7, 2006
Method for fabricating semiconductor device capable of preventing damage by wet cleaning process
HYNIX SEMICONDUCTOR INC24 citations93
US6972262B2Dec 6, 2005
Method for fabricating semiconductor device with improved tolerance to wet cleaning process
HYNIX SEMICONDUCTOR INC29 citations93
US7122467B2Oct 17, 2006
Method for fabricating semiconductor device
HYNIX SEMICONDUCTOR INC30 citations92
US7037850B2May 2, 2006
Method for fabricating semiconductor device with fine patterns
HYNIX SEMICONDUCTOR INC36 citations92
US6784084B2Aug 31, 2004
Method for fabricating semiconductor device capable of reducing seam generations
HYNIX SEMICONDUCTOR INC24 citations92
US6569778B2May 27, 2003
Method for forming fine pattern in semiconductor device
HYNIX SEMICONDUCTOR INC22 citations92
US7314792B2Jan 1, 2008
Method for fabricating transistor of semiconductor device
HYNIX SEMICONDUCTOR INC19 citations89
US7179744B2Feb 20, 2007
Method for fabricating semiconductor device
HYNIX SEMICONDUCTOR INC11 citations84
US6897159B1May 24, 2005
Method for fabricating semiconductor device
HYNIX SEMICONDUCTOR INC19 citations84
US6852592B2Feb 8, 2005
Methods for fabricating semiconductor devices
HYNIX SEMICONDUCTOR INC13 citations84
US7442648B2Oct 28, 2008
Method for fabricating semiconductor device using tungsten as sacrificial hard mask
HYNIX SEMICONDUCTOR INC9 citations83
US8012881B1Sep 6, 2011
Method for forming contact holes in semiconductor device
HYNIX SEMICONDUCTOR INC14 citations81
US7125496B2Oct 24, 2006
Etching method using photoresist etch barrier
HYNIX SEMICONDUCTOR INC9 citations74
US7026253B2Apr 11, 2006
Method for fabricating semiconductor device using ArF photolithography capable of protecting tapered profile of hard mask
HYNIX SEMICONDUCTOR INC8 citations74
US6903428B2Jun 7, 2005
Semiconductor device capable of preventing a pattern collapse
HYNIX SEMICONDUCTOR INC11 citations74
US6867145B2Mar 15, 2005
Method for fabricating semiconductor device using photoresist pattern formed with argon fluoride laser
HYNIX SEMICONDUCTOR INC11 citations74
US6800522B2Oct 5, 2004
Method for fabricating semiconductor device with storage node contact structure
HYNIX SEMICONDUCTOR INC12 citations74
US6784051B2Aug 31, 2004
Method for fabricating semiconductor device
HYNIX SEMICONDUCTOR INC9 citations74
US7410866B2Aug 12, 2008
Method for forming storage node of capacitor in semiconductor device
HYNIX SEMICONDUCTOR INC6 citations73
US6764893B2Jul 20, 2004
Method for reducing a parasitic capacitance of a semiconductive memory cell using metal mask for sidewall formation
HYNIX SEMICONDUCTOR INC10 citations73
US6723640B2Apr 20, 2004
Method for forming contact plug of semiconductor device
HYNIX SEMICONDUCTOR INC7 citations73
US7018930B2Mar 28, 2006
Method for fabricating semiconductor device
HYNIX SEMICONDUCTOR INC10 citations72
US6933236B2Aug 23, 2005
Method for forming pattern using argon fluoride photolithography
HYNIX SEMICONDUCTOR INC10 citations71
US7482279B2Jan 27, 2009
Method for fabricating semiconductor device using ArF photolithography capable of protecting tapered profile of hard mask
HYNIX SEMICONDUCTOR INC3 citations63
US7405091B2Jul 29, 2008
Method for testing contact open in semicoductor device
HYNIX SEMICONDUCTOR INC4 citations63
US7244676B2Jul 17, 2007
Method for fabricating semiconductor device
HYNIX SEMICONDUCTOR INC2 citations63
US7199051B2Apr 3, 2007
Method for fabricating semiconductor device capable of preventing damages to conductive structure
HYNIX SEMICONDUCTOR INC5 citations63
US7138340B2Nov 21, 2006
Method for fabricating semiconductor device without damaging hard mask during contact formation process
HYNIX SEMICONDUCTOR INC6 citations63
US7119013B2Oct 10, 2006
Method for fabricating semiconductor device with fine patterns
HYNIX SEMICONDUCTOR INC5 citations63
US7074722B2Jul 11, 2006
Method for fabricating semiconductor device with fine pattern
HYNIX SEMICONDUCTOR INC2 citations63
US6994949B2Feb 7, 2006
Method for manufacturing multi-level interconnections with dual damascene process
HYNIX SEMICONDUCTOR INC5 citations63
US6916733B2Jul 12, 2005
Method for fabricating contact pad of semiconductor device
HYNIX SEMICONDUCTOR INC2 citations63
US6878637B2Apr 12, 2005
Method for fabricating semiconductor device capable of improving process margin of self align contact
HYNIX SEMICONDUCTOR INC4 citations63
US6833319B2Dec 21, 2004
Method for fabricating semiconductor device
HYNIX SEMICONDUCTOR INC3 citations63
US6780763B2Aug 24, 2004
Method for fabricating semiconductor device capable of improving gap-fill property
HYNIX SEMICONDUCTOR INC3 citations63
US6436806B2Aug 20, 2002
Semiconductor device manufacturing method for preventing electrical shorts between lower and upper interconnection layers
HYNIX SEMICONDUCTOR INC3 citations63
US7491606B2Feb 17, 2009
Semiconductor device and method for fabricating the same
HYNIX SEMICONDUCTOR INC2 citations62
US7052999B2May 30, 2006
Method for fabricating semiconductor device
HYNIX SEMICONDUCTOR INC3 citations62
US6703314B2Mar 9, 2004
Method for fabricating semiconductor device
HYNIX SEMICONDUCTOR INC3 citations61
US7476625B2Jan 13, 2009
Method for fabricating semiconductor device
HYNIX SEMICONDUCTOR INC3 citations60
US6709986B2Mar 23, 2004
Method for manufacturing semiconductor memory device by using photoresist pattern exposed with ArF laser beam
HYNIX SEMICONDUCTOR INC2 citations60
HYUNDAI ELECTRONICS IND
2 patentsSK HYNIX INC
2 patentsSAMSUNG ELECTRONICS CO LTD
1 patentSUN JUN-HYEUB
1 patentD&D PHARMATECH INC
1 patentShowing the top 50 of 72 patents by PatentIndex Score.