Inventor
YANG WEIDUNG
US2 patents
Patents
2 patentsUS7627392B2Dec 1, 2009
Automated process control using parameters determined with approximation and fine diffraction models
TOKYO ELECTRON LTD12 citations82
US7729873B2Jun 1, 2010
Determining profile parameters of a structure using approximation and fine diffraction models in optical metrology
TOKYO ELECTRON LTD2 citations60