Inventor
KITAGAWARA YUTAKA
JP9 patents
Patents
9 patentsUS5612539AMar 18, 1997
Method of evaluating lifetime related quality of semiconductor surface
SHINETSU HANDOTAI KK11 citations73
US5444246AAug 22, 1995
Determining carbon concentration in silicon single crystal by FT-IR
SHINETSU HANDOTAI KK11 citations73
US5302832AApr 12, 1994
Method for evaluation of spatial distribution of deep level concentration in semiconductor crystal
SHINETSU HANDOTAI KK9 citations73
US5841532ANov 24, 1998
Method for evaluating oxygen concentrating in semiconductor silicon single crystal
SHINETSU HANDOTAI KK10 citations71
US5386118AJan 31, 1995
Method and apparatus for determination of interstitial oxygen concentration in silicon single crystal
SHINETSU HANDOTAI KK10 citations71
US5209811AMay 11, 1993
Method for heat-treating gallium arsenide monocrystals
SHINETSU HANDOTAI KK7 citations71
US5533387AJul 9, 1996
Method of evaluating silicon wafers
SHINETSU HANDOTAI KK6 citations62
US5228927AJul 20, 1993
Method for heat-treating gallium arsenide monocrystals
SHINETSU HANDOTAI KK5 citations60
US7718446B2May 18, 2010
Evaluation method for crystal defect in silicon single crystal wafer
SHINETSU HANDOTAI KK2 citations59