Inventor
OLSEN CHRISTOPHER SEAN
US12 patents
⚠️ This page may combine multiple inventors who share the name “OLSEN CHRISTOPHER SEAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS7727828B2Jun 1, 2010
Method for fabricating a gate dielectric of a field effect transistor
APPLIED MATERIALS INC8 citations83
US7645710B2Jan 12, 2010
Method and apparatus for fabricating a high dielectric constant transistor gate using a low energy plasma system
APPLIED MATERIALS INC13 citations83
US7888217B2Feb 15, 2011
Method for fabricating a gate dielectric of a field effect transistor
APPLIED MATERIALS INC5 citations62
US7575986B2Aug 18, 2009
Gate interface relaxation anneal method for wafer processing with post-implant dynamic surface annealing
APPLIED MATERIALS INC2 citations60
US12341032B2Jun 24, 2025
Methods of selective oxidation on rapid thermal processing (RTP) chamber with active steam generation
APPLIED MATERIALS INC0 citations56
US11996305B2May 28, 2024
Selective oxidation on rapid thermal processing (RTP) chamber with active steam generation
APPLIED MATERIALS INC0 citations56
US7737036B2Jun 15, 2010
Integrated circuit fabrication process with minimal post-laser annealing dopant deactivation
APPLIED MATERIALS INC1 citations51
US9530898B2Dec 27, 2016
Semiconductor devices suitable for narrow pitch applications and methods of fabrication thereof
APPLIED MATERIALS INC0 citations49
US7863193B2Jan 4, 2011
Integrated circuit fabrication process using a compression cap layer in forming a silicide with minimal post-laser annealing dopant deactivation
APPLIED MATERIALS INC0 citations41