Inventor

LISCHER D JEFFREY

US22 patents

⚠️ This page may combine multiple inventors who share the name “LISCHER D JEFFREY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LISCHER D JEFFREY

APPLIED MATERIALS INC

Load lock with integrated features

Hybrid control system for workpiece heating

Enhanced substrate temperature measurement apparatus, system and method

Model-based controlled load lock pumping scheme

Method and apparatus for calibration of substrate temperature using pyrometer

MKS INSTR INC

System for delivering a substantially constant vapor flow to a chemical process reactor

Capacitive pressure transducer with improved electrode support

Pressure-based mass flow controller

Contaminant deposition control baffle for a capacitive pressure transducer

VARIAN SEMICONDUCTOR EQUIPMENT

Dynamic heating method and system for wafer processing

Techniques for low-temperature ion implantation

Method and apparatus for controlling beam current uniformity in an ion implanter

Interfacing two insulation parts in high voltage environment

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Hybrid thermal electrostatic clamp

Apparatus for heating and processing a substrate

Apparatus for improving temperature uniformity of a workpiece

Substrate handling and heating system

BUFF JAMES S

Techniques for improving extracted ion beam quality using high-transparency electrodes

LOW RUSSELL

Insulator system for a terminal structure of an ion implantation system

STONE DALE K

Method of cooling textured workpieces with an electrostatic chuck

LOW RUSSELL J

Interfacing two insulation parts in high voltage environment

CITVER GREGORY

Current lead with a configuration to reduce heat load transfer in an alternating electrical current environment