Inventor
ZHANG YONGKUI
CN4 patents
Patents
4 patentsUS9431504B2Aug 30, 2016
Semiconductor device and method for manufacturing the same
INST OF MICROELECTRONICS CAS4 citations69
US12550391B2Feb 10, 2026
Semiconductor apparatus having staggered structure and method of manufacturing the same, and electronic device
INST OF MICROELECTRONICS CAS0 citations55
US11827988B2Nov 28, 2023
High-precision etching method
INST OF MICROELECTRONICS CAS0 citations55
US11447876B2Sep 20, 2022
High-precision etching method
INST OF MICROELECTRONICS CAS0 citations55