P

Inventor

ARAHORI TADAHISA

JP7 patents
⚠️ This page may combine multiple inventors who share the name “ARAHORI TADAHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUMITOMO METAL IND

3 patents
US5380511AJan 10, 1995

Process for producing silicon carbide-base complex

SUMITOMO METAL IND20 citations90
US7112549B2Sep 26, 2006

Low thermal expansion ceramic and member for exposure system

SUMITOMO METAL IND23 citations87
US7160825B2Jan 9, 2007

Machinable ceramic

SUMITOMO METAL IND10 citations76

OKAMOTO KEN

2 patents
US8158544B2Apr 17, 2012

Yttria sintered body and component used for plasma processing apparatus

OKAMOTO KEN2 citations60
US10504706B2Dec 10, 2019

Sputtering target and method for producing the same

OKAMOTO KEN0 citations42

FERROTEC CERAMICS CORP

1 patent
US9824868B2Nov 21, 2017

Sputtering target and method for producing the same

FERROTEC CERAMICS CORP2 citations58

NAKANO KATSUAKI

1 patent
US8231967B2Jul 31, 2012

Surface-treated ceramic member, method for producing the same and vacuum processing apparatus

NAKANO KATSUAKI2 citations58