Inventor
SHAUGHNESSY DERRICK
US9 patents
⚠️ This page may combine multiple inventors who share the name “SHAUGHNESSY DERRICK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
6 patentsUS8860937B1Oct 14, 2014
Metrology systems and methods for high aspect ratio and large lateral dimension structures
KLA TENCOR CORP35 citations93
US10006865B1Jun 26, 2018
Confined illumination for small spot size metrology
KLA TENCOR CORP8 citations83
US9400246B2Jul 26, 2016
Optical metrology tool equipped with modulated illumination sources
KLA TENCOR CORP5 citations83
US9719932B1Aug 1, 2017
Confined illumination for small spot size metrology
KLA TENCOR CORP2 citations72
US9512985B2Dec 6, 2016
Systems for providing illumination in optical metrology
KLA TENCOR CORP2 citations60
US10804167B2Oct 13, 2020
Methods and systems for co-located metrology
KLA TENCOR CORP0 citations40