Inventor
ZHUANG GUORONG V
US16 patents
⚠️ This page may combine multiple inventors who share the name “ZHUANG GUORONG V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
11 patentsUS7929667B1Apr 19, 2011
High brightness X-ray metrology
KLA TENCOR CORP191 citations98
US9470639B1Oct 18, 2016
Optical metrology with reduced sensitivity to grating anomalies
KLA TENCOR CORP31 citations93
US9693439B1Jun 27, 2017
High brightness liquid droplet X-ray source for semiconductor metrology
KLA TENCOR CORP20 citations92
US7760364B1Jul 20, 2010
Systems and methods for near-field heterodyne spectroscopy
KLA TENCOR CORP19 citations92
US9846132B2Dec 19, 2017
Small-angle scattering X-ray metrology systems and methods
KLA TENCOR CORP10 citations84
US7928390B1Apr 19, 2011
Infrared metrology
KLA TENCOR CORP12 citations84
US10006865B1Jun 26, 2018
Confined illumination for small spot size metrology
KLA TENCOR CORP8 citations83
US9719932B1Aug 1, 2017
Confined illumination for small spot size metrology
KLA TENCOR CORP2 citations72
US8790603B2Jul 29, 2014
Apparatus for purifying a controlled-pressure environment
KLA TENCOR CORP0 citations51
US9156068B2Oct 13, 2015
Methods and apparatus for cleaning objects in a chamber of an optical instrument by generating reactive ions using photon radiation
KLA TENCOR CORP0 citations44
US9970863B2May 15, 2018
Optical metrology with reduced focus error sensitivity
KLA TENCOR CORP0 citations42