Inventor

INAI KENSUKE

JP5 patents

⚠️ This page may combine multiple inventors who share the name “INAI KENSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents

US9960056B2May 1, 2018

Substrate cleaning method, substrate cleaning apparatus and vacuum processing system

TOKYO ELECTRON LTD10 citations82

US9881815B2Jan 30, 2018

Substrate cleaning method, substrate cleaning device, and vacuum processing device

TOKYO ELECTRON LTD4 citations72

US10049899B2Aug 14, 2018

Substrate cleaning apparatus

TOKYO ELECTRON LTD0 citations39

INAI KENSUKE

1 patent

US9837260B2Dec 5, 2017

Cleaning method, processing apparatus, and storage medium

INAI KENSUKE12 citations77

DOBASHI KAZUYA

1 patent

US9214364B2Dec 15, 2015

Substrate cleaning apparatus and vacuum processing system

DOBASHI KAZUYA3 citations57