P

Inventor

RAY-CHAUDHURI AVIJIT K

US9 patents
⚠️ This page may combine multiple inventors who share the name “RAY-CHAUDHURI AVIJIT K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EUV LLC

6 patents
US6235434B1May 22, 2001

Method for mask repair using defect compensation

EUV LLC70 citations95
US6198792B1Mar 6, 2001

Wafer chamber having a gas curtain for extreme-UV lithography

EUV LLC34 citations90
US6395455B2May 28, 2002

Low thermal distortion Extreme-UV lithography reticle and method

EUV LLC6 citations72
US6316150B1Nov 13, 2001

Low thermal distortion extreme-UV lithography reticle

EUV LLC9 citations72
US6206528B1Mar 27, 2001

Surface figure control for coated optics

EUV LLC12 citations72
US6441885B2Aug 27, 2002

Low thermal distortion extreme-UV lithography reticle

EUV LLC2 citations61

EUV L L C

1 patent
US6118577ASep 12, 2000

Diffractive element in extreme-UV lithography condenser

EUV L L C81 citations94

KLA TENCOR TECH CORP

1 patent
US7345754B1Mar 18, 2008

Fourier filters and wafer inspection systems

KLA TENCOR TECH CORP40 citations92

KLA TENCOR CORP

1 patent
US10127652B2Nov 13, 2018

Defect detection and classification based on attributes determined from a standard reference image

KLA TENCOR CORP9 citations83