Inventor
BABULNATH RAGHAV
US9 patents
Patents
9 patentsUS10127652B2Nov 13, 2018
Defect detection and classification based on attributes determined from a standard reference image
KLA TENCOR CORP9 citations83
US9310320B2Apr 12, 2016
Based sampling and binning for yield critical defects
KLA TENCOR CORP8 citations81
US9865512B2Jan 9, 2018
Dynamic design attributes for wafer inspection
KLA TENCOR CORP10 citations80
US9766187B2Sep 19, 2017
Repeater detection
KLA TENCOR CORP2 citations70
US9996942B2Jun 12, 2018
Sub-pixel alignment of inspection to design
KLA TENCOR CORP3 citations69
US9835566B2Dec 5, 2017
Adaptive nuisance filter
KLA TENCOR CORP1 citations50
US9563943B2Feb 7, 2017
Based sampling and binning for yield critical defects
KLA TENCOR CORP1 citations49
US10620134B2Apr 14, 2020
Creating defect samples for array regions
KLA TENCOR CORP0 citations35
US10712289B2Jul 14, 2020
Inspection for multiple process steps in a single inspection process
KLA TENCOR CORP0 citations29