Inventor
IKEMOTO MAKOTO
JP11 patents
⚠️ This page may combine multiple inventors who share the name “IKEMOTO MAKOTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI CHEM CORP
10 patentsUS7541322B2Jun 2, 2009
Cleaning solution for substrate for semiconductor device and cleaning method
MITSUBISHI CHEM CORP22 citations92
US9508648B2Nov 29, 2016
Three-dimensional integrated circuit laminate, and interlayer filler for three-dimensional integrated circuit laminate
MITSUBISHI CHEM CORP6 citations81
US7621281B2Nov 24, 2009
Cleaning solution for cleaning substrate for semiconductor devices and cleaning method using the same
MITSUBISHI CHEM CORP7 citations73
US5635329AJun 3, 1997
Photosensitive resin composition and method for forming a pattern using the composition
MITSUBISHI CHEM CORP7 citations73
US9847298B2Dec 19, 2017
Three-dimensional integrated circuit laminate, and interlayer filler for three-dimensional integrated circuit laminate
MITSUBISHI CHEM CORP3 citations70
US9822294B2Nov 21, 2017
Agglomerated boron nitride particles, composition containing said particles, and three-dimensional integrated circuit having layer comprising said composition
MITSUBISHI CHEM CORP3 citations70
US5698362ADec 16, 1997
1,2 quinone diazide photosensitive resin composition containing select additive and method for forming a photoresist pattern
MITSUBISHI CHEM CORP6 citations62
US10400151B2Sep 3, 2019
Agglomerated boron nitride particles, composition containing said particles, and three- dimensional integrated circuit having layer comprising said composition
MITSUBISHI CHEM CORP0 citations49
US10125289B2Nov 13, 2018
Composition for interlayer filler of layered semiconductor device, layered semiconductor device, and process for producing layered semiconductor device
MITSUBISHI CHEM CORP0 citations37
US9960092B2May 1, 2018
Interlayer filler composition for three-dimensional integrated circuit
MITSUBISHI CHEM CORP0 citations36