Inventor
WU BENNY
US4 patents
Patents
4 patentsUS10690414B2Jun 23, 2020
Multi-plane heater for semiconductor substrate support
LAM RES CORP5 citations70
US10381248B2Aug 13, 2019
Auto-correction of electrostatic chuck temperature non-uniformity
LAM RES CORP2 citations70
US10224187B1Mar 5, 2019
Detecting partial unclamping of a substrate from an ESC of a substrate processing system
LAM RES CORP0 citations46
US12142464B2Nov 12, 2024
In situ real-time sensing and compensation of non-uniformities in substrate processing systems
LAM RES CORP0 citations45