Inventor
GAFF KEITH WILLIAM
US22 patents
⚠️ This page may combine multiple inventors who share the name “GAFF KEITH WILLIAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
15 patentsUS10056225B2Aug 21, 2018
Adjusting substrate temperature to improve CD uniformity
LAM RES CORP36 citations94
US8587113B2Nov 19, 2013
Thermal plate with planar thermal zones for semiconductor processing
LAM RES CORP40 citations94
US10049948B2Aug 14, 2018
Power switching system for ESC with array of thermal control elements
LAM RES CORP14 citations83
US10090211B2Oct 2, 2018
Edge seal for lower electrode assembly
LAM RES CORP2 citations71
US11781650B2Oct 10, 2023
Edge seal for lower electrode assembly
LAM RES CORP1 citations70
US10690414B2Jun 23, 2020
Multi-plane heater for semiconductor substrate support
LAM RES CORP5 citations70
US10381248B2Aug 13, 2019
Auto-correction of electrostatic chuck temperature non-uniformity
LAM RES CORP2 citations70
US9716022B2Jul 25, 2017
Method of determining thermal stability of a substrate support assembly
LAM RES CORP2 citations70
US10770363B2Sep 8, 2020
Power switching system for ESC with array of thermal control elements
LAM RES CORP1 citations62
US7802917B2Sep 28, 2010
Method and apparatus for chuck thermal calibration
LAM RES CORP4 citations62
US10892197B2Jan 12, 2021
Edge seal configurations for a lower electrode assembly
LAM RES CORP1 citations61
US12368025B2Jul 22, 2025
Edge seal for lower electrode assembly
LAM RES CORP0 citations60
US9530679B2Dec 27, 2016
Method and apparatus for chuck thermal calibration
LAM RES CORP0 citations52
US9543171B2Jan 10, 2017
Auto-correction of malfunctioning thermal control element in a temperature control plate of a semiconductor substrate support assembly that includes deactivating the malfunctioning thermal control element and modifying a power level of at least one functioning thermal control element
LAM RES CORP1 citations51
US10437236B2Oct 8, 2019
Method of determining thermal stability of a substrate support assembly
LAM RES CORP0 citations49
GAFF KEITH WILLIAM
4 patentsUS8624168B2Jan 7, 2014
Heating plate with diode planar heater zones for semiconductor processing
GAFF KEITH WILLIAM57 citations97
US8461674B2Jun 11, 2013
Thermal plate with planar thermal zones for semiconductor processing
GAFF KEITH WILLIAM63 citations97
US8642480B2Feb 4, 2014
Adjusting substrate temperature to improve CD uniformity
GAFF KEITH WILLIAM22 citations92
US8449174B2May 28, 2013
Method and apparatus for chuck thermal calibration
GAFF KEITH WILLIAM2 citations62