Inventor
Pai Yueh-Ching
TW36 patents
⚠️ This page may combine multiple inventors who share the name “Pai Yueh-Ching”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
35 patentsUS10535523B1Jan 14, 2020
Formation and in-situ etching processes for metal layers
TAIWAN SEMICONDUCTOR MFG CO LTD12 citations93
US10985061B2Apr 20, 2021
Methods for forming contact plugs with reduced corrosion
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations84
US10483165B2Nov 19, 2019
Methods for forming contact plugs with reduced corrosion
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations84
US10186456B2Jan 22, 2019
Methods for forming contact plugs with reduced corrosion
TAIWAN SEMICONDUCTOR MFG CO LTD8 citations84
US11973124B2Apr 30, 2024
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11410889B2Aug 9, 2022
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10468530B2Nov 5, 2019
Semiconductor structure with source/drain multi-layer structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11545363B2Jan 3, 2023
Formation and in-situ etching processes for metal layers
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations72
US11990550B2May 21, 2024
Semiconductor structure with source/drain multi-layer structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11527655B2Dec 13, 2022
Semiconductor structure with source/drain multi-layer structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US10937910B2Mar 2, 2021
Semiconductor structure with source/drain multi-layer structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12520545B2Jan 6, 2026
Semiconductor device with offset source/drain regions and methods of formation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12490508B2Dec 2, 2025
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12484291B2Nov 25, 2025
Semiconductor device and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12394624B2Aug 19, 2025
Silicon intermixing layer for blocking diffusion
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12170202B2Dec 17, 2024
Formation and in-situ etching processes for metal layers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12170325B2Dec 17, 2024
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11742404B2Aug 29, 2023
Method of manufacturing a semiconductor device and a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11587791B2Feb 21, 2023
Silicon intermixing layer for blocking diffusion
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11398482B2Jul 26, 2022
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10971602B2Apr 6, 2021
High-k metal gate process and device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12166126B2Dec 10, 2024
Gate structure and semiconductor device having the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12068197B2Aug 20, 2024
Methods for forming contact plugs with reduced corrosion
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11411112B2Aug 9, 2022
Gate structure, method of forming the same, and semiconductor device having the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12191199B2Jan 7, 2025
Contact metallization process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10964590B2Mar 30, 2021
Contact metallization process
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US12484257B2Nov 25, 2025
Method of forming gate structures for nanostructures
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations54
US12506079B2Dec 23, 2025
Semiconductor device with backside power rail and methods of fabrication thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US12382693B2Aug 5, 2025
Semiconductor device and methods of formation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10679995B2Jun 9, 2020
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US12588244B2Mar 24, 2026
Semiconductor devices and methods of fabrication thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10872769B2Dec 22, 2020
Formation and in-situ etching processes for metal layers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10629700B1Apr 21, 2020
High-K metal gate process and device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US10752995B2Aug 25, 2020
Material delivery system and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations41
US10332789B2Jun 25, 2019
Semiconductor device with TiN adhesion layer for forming a contact plug
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations40