Inventor
YAMAMOTO NOBUHIKO
JP10 patents
⚠️ This page may combine multiple inventors who share the name “YAMAMOTO NOBUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS7226524B2Jun 5, 2007
Plasma processing apparatus
TOKYO ELECTRON LTD12 citations82
US12243718B2Mar 4, 2025
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD2 citations74
US9702913B2Jul 11, 2017
Acquisition method for S-parameters in microwave introduction modules, and malfunction detection method
TOKYO ELECTRON LTD2 citations72
US11967485B2Apr 23, 2024
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations62
US11476088B2Oct 18, 2022
Array antenna and plasma processing apparatus
TOKYO ELECTRON LTD0 citations62
US7910495B2Mar 22, 2011
Plasma oxidizing method, plasma processing apparatus, and storage medium
TOKYO ELECTRON LTD5 citations61
US12046453B2Jul 23, 2024
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations51
US10319567B2Jun 11, 2019
Microwave plasma source and plasma processing apparatus
TOKYO ELECTRON LTD0 citations39