Inventor
MUN HYOUNGYOL
KR5 patents
Patents
5 patentsUS11735498B2Aug 22, 2023
Through via electrode and device isolation structure including oxide layer pattern and nitride layer pattern sequentially stacked on inner surface of trench
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Three-dimensional semiconductor memory device
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Semiconductor devices having bonding structures with bonding pads and metal patterns
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Semiconductor device
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Semiconductor device
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