Inventor

LEE MYONG EUY

KR2 patents

Patents

2 patents

US11987740B2May 21, 2024

Silicon nitride film etching composition and etching method using the same

ENF TECHNOLOGY CO LTD0 citations56

US11939505B2Mar 26, 2024

Silicon nitride film etching composition and etching method using the same

ENF TECHNOLOGY CO LTD0 citations46