Inventor
WU JUNG-TANG
TW26 patents
Patents
26 patentsUS11031236B2Jun 8, 2021
Method for improving surface of semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations83
US10535816B2Jan 14, 2020
Via structure, MRAM device using the via structure and method for fabricating the MRAM device
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations83
US11515474B2Nov 29, 2022
Memory device and method for fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10879114B1Dec 29, 2020
Conductive fill
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US10862026B2Dec 8, 2020
Memory device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11696510B2Jul 4, 2023
Diffusion layer for magnetic tunnel junctions
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11107980B2Aug 31, 2021
MRAM fabrication and device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11024801B2Jun 1, 2021
Diffusion layer for magnetic tunnel junctions
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10991876B2Apr 27, 2021
Methods to improve magnetic tunnel junction memory cells by treating native oxide
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US10636702B2Apr 28, 2020
Conductive interconnect structures in integrated circuits
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71
US10727118B2Jul 28, 2020
Method for manufacturing semiconductor device and pre-clean apparatus for semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US10533852B1Jan 14, 2020
Leveling sensor, load port including the same, and method of leveling a load port
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US12364165B2Jul 15, 2025
Methods to improve magnetic tunnel junction memory cells by treating native oxide
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12315720B2May 27, 2025
Method for improving surface of semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11991930B2May 21, 2024
Memory device and method for fabricating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11844283B2Dec 12, 2023
Method to improve magnetic tunnel junction memory cells by treating native oxide
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11749524B2Sep 5, 2023
Method for improving surface of semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12581863B2Mar 17, 2026
MRAM fabrication and device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12310248B2May 20, 2025
Diffusion barrier layer on interconnection vias for magnetic tunnel junctions
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12112930B2Oct 8, 2024
Method for improving deposition process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11864467B2Jan 2, 2024
MRAM fabrication and device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11022437B2Jun 1, 2021
Leveling sensor, load port including the same, and method of leveling a load port
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US11791206B2Oct 17, 2023
Method for forming semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12274176B2Apr 8, 2025
Method of manufacturing MRAM device with enhanced etch control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US11985904B2May 14, 2024
Method of manufacturing MRAM device with enhanced etch control
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10872815B2Dec 22, 2020
Conductive interconnect structures in integrated circuits
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50