Inventor
SUH SONG-MOON
US21 patents
⚠️ This page may combine multiple inventors who share the name “SUH SONG-MOON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
20 patentsUS9425076B2Aug 23, 2016
Substrate transfer robot end effector
APPLIED MATERIALS INC14 citations82
US10431489B2Oct 1, 2019
Substrate support apparatus having reduced substrate particle generation
APPLIED MATERIALS INC3 citations72
US11473189B2Oct 18, 2022
Method for particle removal from wafers through plasma modification in pulsed PVD
APPLIED MATERIALS INC2 citations70
US11815436B2Nov 14, 2023
Detection of surface particles on chamber components with carbon dioxide
APPLIED MATERIALS INC2 citations69
US11441974B2Sep 13, 2022
Detection of surface particles on chamber components with carbon dioxide
APPLIED MATERIALS INC2 citations69
US11555250B2Jan 17, 2023
Organic contamination free surface machining
APPLIED MATERIALS INC2 citations67
US9925639B2Mar 27, 2018
Cleaning of chamber components with solid carbon dioxide particles
APPLIED MATERIALS INC2 citations67
US11033930B2Jun 15, 2021
Methods and apparatus for cryogenic gas stream assisted SAM-based selective deposition
APPLIED MATERIALS INC0 citations62
US12249494B2Mar 11, 2025
Remote plasma cleaning of chambers for electronics manufacturing systems
APPLIED MATERIALS INC0 citations59
US12169163B2Dec 17, 2024
Detection of surface particles on chamber components with carbon dioxide
APPLIED MATERIALS INC0 citations59
US11932934B2Mar 19, 2024
Method for particle removal from wafers through plasma modification in pulsed PVD
APPLIED MATERIALS INC0 citations59
US11854773B2Dec 26, 2023
Remote plasma cleaning of chambers for electronics manufacturing systems
APPLIED MATERIALS INC0 citations59
US9147558B2Sep 29, 2015
Finned shutter disk for a substrate process chamber
APPLIED MATERIALS INC2 citations59
US11932950B2Mar 19, 2024
Organic contamination free surface machining
APPLIED MATERIALS INC0 citations56
US10217650B2Feb 26, 2019
Methods and apparatus for substrate edge cleaning
APPLIED MATERIALS INC0 citations51
US9443714B2Sep 13, 2016
Methods and apparatus for substrate edge cleaning
APPLIED MATERIALS INC0 citations51
US9269562B2Feb 23, 2016
In situ chamber clean with inert hydrogen helium mixture during wafer process
APPLIED MATERIALS INC1 citations50
US11508610B2Nov 22, 2022
Substrate support with edge seal
APPLIED MATERIALS INC0 citations47
US9177782B2Nov 3, 2015
Methods and apparatus for cleaning a substrate
APPLIED MATERIALS INC1 citations46
US10755903B2Aug 25, 2020
RPS defect reduction by cyclic clean induced RPS cooling
APPLIED MATERIALS INC0 citations39