P

Inventor

YU HANG

US51 patents
⚠️ This page may combine multiple inventors who share the name “YU HANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

20 patents
US10515796B2Dec 24, 2019

Dry etch rate reduction of silicon nitride films

APPLIED MATERIALS INC2 citations73
US12412741B2Sep 9, 2025

Silicon oxide gap fill using capacitively coupled plasmas

APPLIED MATERIALS INC0 citations61
US11136665B2Oct 5, 2021

Shadow ring for modifying wafer edge and bevel deposition

APPLIED MATERIALS INC1 citations61
US11538677B2Dec 27, 2022

Systems and methods for depositing high density and high tensile stress films

APPLIED MATERIALS INC0 citations60
US11515145B2Nov 29, 2022

Deposition of silicon boron nitride films

APPLIED MATERIALS INC0 citations60
US12451345B2Oct 21, 2025

PECVD of SiBN thin films with low leakage current

APPLIED MATERIALS INC0 citations59
US11935751B2Mar 19, 2024

Boron nitride for mask patterning

APPLIED MATERIALS INC0 citations59
US11217443B2Jan 4, 2022

Sequential deposition and high frequency plasma treatment of deposited film on patterned and un-patterned substrates

APPLIED MATERIALS INC0 citations59
US12564022B2Feb 24, 2026

Carbon hardmask opening using boron nitride mask

APPLIED MATERIALS INC0 citations58
US12338530B2Jun 24, 2025

Shaped showerhead for edge plasma modulation

APPLIED MATERIALS INC0 citations58
US11929278B2Mar 12, 2024

Low impedance current path for edge non-uniformity tuning

APPLIED MATERIALS INC0 citations58
US11869795B2Jan 9, 2024

Mesa height modulation for thickness correction

APPLIED MATERIALS INC0 citations58
US12543521B2Feb 3, 2026

Methods of forming memory device with reduced resistivity

APPLIED MATERIALS INC0 citations56
US8349741B2Jan 8, 2013

Amorphous carbon deposition method for improved stack defectivity

APPLIED MATERIALS INC0 citations51
US11276570B2Mar 15, 2022

Multi-layer deposition and treatment of silicon nitride films

APPLIED MATERIALS INC0 citations50
US11157661B2Oct 26, 2021

Process development visualization tool

APPLIED MATERIALS INC0 citations49
US11710631B2Jul 25, 2023

Tensile nitride deposition systems and methods

APPLIED MATERIALS INC0 citations48
US10950430B2Mar 16, 2021

Pulsed plasma deposition etch step coverage improvement

APPLIED MATERIALS INC0 citations46
US12195846B2Jan 14, 2025

Modified stacks for 3D NAND

APPLIED MATERIALS INC0 citations45
US12020907B2Jun 25, 2024

Faceplate with localized flow control

APPLIED MATERIALS INC0 citations41

MICROSOFT TECHNOLOGY LICENSING LLC

4 patents

TENCENT TECH SHENZHEN CO LTD

3 patents

UNIV WENZHOU MEDICAL

2 patents

PAYPAL INC

2 patents

YU HANG

1 patent

SKYLARK WIRELESS LLC

1 patent

MICROSOFT CORP

1 patent

FORTEMEDIA INC

1 patent

DU BOIS DALE R

1 patent

UNIV JOHNS HOPKINS

1 patent

UNIV ZHEJIANG

1 patent

KOBE STEEL LTD

1 patent

ZHOU JIANHUA

1 patent

BOSCH GMBH ROBERT

1 patent

SKYLARK WL HOLDINGS LLC

1 patent

SHANGHAI MEDIWORKS PREC INSTR CO LTD

1 patent

SHANDONG FEILONG FOOD CO LTD

1 patent

MASSACHUSETTS INST TECHNOLOGY

1 patent

UNIV SHANGHAI

1 patent

UNIV JIANGNAN

1 patent

NINGBO SUNNY OPOTECH CO LTD

1 patent

XIE YUNFEI

1 patent

NANJING NANJI INTELLIGENT AGRICULTURAL MACHINERY TECH RESEARCH INSTITUTE CO LTD

1 patent

Showing the top 50 of 51 patents by PatentIndex Score.