Inventor
SHIBAGAKI MASAHIRO
9 patents
⚠️ This page may combine multiple inventors who share the name “SHIBAGAKI MASAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO SHIBAURA ELECTRIC CO
7 patentsUS4065369ADec 27, 1977
Activated gas reaction apparatus & method
TOKYO SHIBAURA ELECTRIC CO81 citations96
US4151034AApr 24, 1979
Continuous gas plasma etching apparatus
TOKYO SHIBAURA ELECTRIC CO121 citations95
US4277304AJul 7, 1981
Ion source and ion etching process
TOKYO SHIBAURA ELECTRIC CO61 citations93
US4252595AFeb 24, 1981
Etching apparatus using a plasma
TOKYO SHIBAURA ELECTRIC CO46 citations92
US4160690AJul 10, 1979
Gas etching method and apparatus
TOKYO SHIBAURA ELECTRIC CO53 citations92
US4094722AJun 13, 1978
Etching apparatus using a plasma
TOKYO SHIBAURA ELECTRIC CO41 citations92
US4175235ANov 20, 1979
Apparatus for the plasma treatment of semiconductors
TOKYO SHIBAURA ELECTRIC CO29 citations82