Inventor
KREN GEORGE J
15 patents
⚠️ This page may combine multiple inventors who share the name “KREN GEORGE J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TENCOR INSTRUMENTS
10 patentsUS5416594AMay 16, 1995
Surface scanner with thin film gauge
TENCOR INSTRUMENTS210 citations99
US4302721ANov 24, 1981
Non-contacting resistivity instrument with structurally related conductance and distance measuring transducers
TENCOR INSTRUMENTS56 citations96
US4766324AAug 23, 1988
Particle detection method including comparison between sequential scans
TENCOR INSTRUMENTS138 citations95
US4597708AJul 1, 1986
Wafer handling apparatus
TENCOR INSTRUMENTS36 citations92
US4103542AAug 1, 1978
Metrology instrument for measuring vertical profiles of integrated circuits
TENCOR INSTRUMENTS29 citations82
US4376482AMar 15, 1983
Wafer orientation system
TENCOR INSTRUMENTS22 citations81
US4280354AJul 28, 1981
Acoustic method and apparatus for measuring surfaces of wafers and similar articles
TENCOR INSTRUMENTS18 citations74
US4285053AAug 18, 1981
Acoustic method and apparatus for measuring micron and submicron distances
TENCOR INSTRUMENTS13 citations73
US4175441ANov 27, 1979
Gauge for measuring distance to planar surfaces and thicknesses of planar members
TENCOR INSTRUMENTS18 citations73
US4282483AAug 4, 1981
Probe for determining p or n-type conductivity of semiconductor material
TENCOR INSTRUMENTS5 citations62
KLA TENCOR TECH CORP
3 patentsUS6781688B2Aug 24, 2004
Process for identifying defects in a substrate having non-uniform surface properties
KLA TENCOR TECH CORP90 citations98
US7199874B2Apr 3, 2007
Darkfield inspection system having a programmable light selection array
KLA TENCOR TECH CORP26 citations92
US7002677B2Feb 21, 2006
Darkfield inspection system having a programmable light selection array
KLA TENCOR TECH CORP31 citations92