Inventor
POAG FRANK
US4 patents
⚠️ This page may combine multiple inventors who share the name “POAG FRANK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
3 patentsUS5551165ASep 3, 1996
Enhanced cleansing process for wafer handling implements
TEXAS INSTRUMENTS INC56 citations92
US5839455ANov 24, 1998
Enhanced high pressure cleansing system for wafer handling implements
TEXAS INSTRUMENTS INC24 citations89
US7601629B2Oct 13, 2009
Semiconductive device fabricated using subliming materials to form interlevel dielectrics
TEXAS INSTRUMENTS INC8 citations81