Inventor
GUTOWSKI ROBERT M
US8 patents
Patents
8 patentsUS6180952B1Jan 30, 2001
Holder assembly system and method in an emitted energy system for photolithography
ADVANCED ENERGY SYST16 citations89
US6133577AOct 17, 2000
Method and apparatus for producing extreme ultra-violet light for use in photolithography
ADVANCED ENERGY SYST39 citations86
US6552350B2Apr 22, 2003
System and method for providing a lithographic light source for a semiconductor manufacturing process
ADVANCED ENERGY SYST5 citations72
US6190835B1Feb 20, 2001
System and method for providing a lithographic light source for a semiconductor manufacturing process
ADVANCED ENERGY SYST12 citations72
US6105885AAug 22, 2000
Fluid nozzle system and method in an emitted energy system for photolithography
ADVANCED ENERGY SYST11 citations72
US6065203AMay 23, 2000
Method of manufacturing very small diameter deep passages
ADVANCED ENERGY SYST10 citations72
US6353232B2Mar 5, 2002
Holder assembly system and method in an emitted energy system for photolithography
ADVANCED ENERGY SYST5 citations70
US6437349B1Aug 20, 2002
Fluid nozzle system and method in an emitted energy system for photolithography
ADVANCED ENERGY SYST2 citations61