Inventor
ONODERA TAKAHIRO
JP14 patents
⚠️ This page may combine multiple inventors who share the name “ONODERA TAKAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NEC CORP
6 patentsUS6165056ADec 26, 2000
Polishing machine for flattening substrate surface
NEC CORP63 citations96
US5717251AFeb 10, 1998
Semiconductor integrated circuit device having minature multi-level wiring structure low in parasitic capacitance
NEC CORP80 citations96
US6270392B1Aug 7, 2001
Polishing apparatus and method with constant polishing pressure
NEC CORP48 citations95
US5640544AJun 17, 1997
Computer network having an asynchronous document data management system
NEC CORP91 citations91
US6425801B1Jul 30, 2002
Polishing process monitoring method and apparatus, its endpoint detection method, and polishing machine using same
NEC CORP49 citations89
US6652354B2Nov 25, 2003
Polishing apparatus and method with constant polishing pressure
NEC CORP14 citations83
IBM
2 patentsUEKI MAKOTO
2 patentsUS8492266B2Jul 23, 2013
Semiconductor device having insulating film with surface modification layer and method for manufacturing the same
UEKI MAKOTO9 citations82
US8080878B2Dec 20, 2011
Semiconductor device having insulating film with surface modification layer and method for manufacturing the same
UEKI MAKOTO10 citations82