Inventor
CHOU HSIAO-PANG
TW22 patents
Patents
22 patentsUS9209273B1Dec 8, 2015
Method of fabricating metal gate structure
UNITED MICROELECTRONICS CORP59 citations97
US6001414ADec 14, 1999
Dual damascene processing method
UNITED MICROELECTRONICS CORP34 citations92
US6221754B1Apr 24, 2001
Method of fabricating a plug
UNITED MICROELECTRONICS CORP57 citations91
US6780761B1Aug 24, 2004
Via-first dual damascene process
UNITED MICROELECTRONICS CORP20 citations90
US10283564B1May 7, 2019
Semiconductor structure and the method of making the same
UNITED MICROELECTRONICS CORP8 citations84
US10269868B1Apr 23, 2019
Semiconductor structure and the method of making the same
UNITED MICROELECTRONICS CORP12 citations84
US10177311B1Jan 8, 2019
Resistive random access memory (RRAM) and fabrication method thereof
UNITED MICROELECTRONICS CORP11 citations84
US9263540B1Feb 16, 2016
Metal gate structure
UNITED MICROELECTRONICS CORP8 citations84
US6080660AJun 27, 2000
Via structure and method of manufacture
UNITED MICROELECTRONICS CORP16 citations84
US6214747B1Apr 10, 2001
Method for forming opening in a semiconductor device
UNITED MICROELECTRONICS CORP15 citations83
US6376382B1Apr 23, 2002
Method for forming an opening
UNITED MICROELECTRONICS CORP12 citations73
US6235644B1May 22, 2001
Method of improving etch back process
UNITED MICROELECTRONICS CORP11 citations73
US9899491B2Feb 20, 2018
Semiconductor device and method of forming the same
UNITED MICROELECTRONICS CORP3 citations72
US5968846AOct 19, 1999
Method for removing silicon nitride material
UNITED MICROELECTRONICS CORP12 citations64
US6500389B1Dec 31, 2002
Plasma arcing sensor
UNITED MICROELECTRONICS CORP2 citations63
US11450747B2Sep 20, 2022
Semiconductor structure with an epitaxial layer
UNITED MICROELECTRONICS CORP0 citations62
US11011376B2May 18, 2021
Method of manufacturing semiconductor structure with an epitaxial layer
UNITED MICROELECTRONICS CORP0 citations62
US10636794B2Apr 28, 2020
Magnetic tunnel junction structure of magnetic random access memory cell
UNITED MICROELECTRONICS CORP0 citations52
US10312238B2Jun 4, 2019
Manufacturing method of magnetic random access memory cell
UNITED MICROELECTRONICS CORP0 citations52
US9384985B2Jul 5, 2016
Semiconductor structure including silicon and oxygen-containing metal layer and process thereof
UNITED MICROELECTRONICS CORP1 citations52
US6422246B1Jul 23, 2002
Method removing residual photoresist
UNITED MICROELECTRONICS CORP1 citations52
US10043882B2Aug 7, 2018
Method of forming semiconductor device
UNITED MICROELECTRONICS CORP0 citations51