Inventor
WU JIN JWANG
US7 patents
⚠️ This page may combine multiple inventors who share the name “WU JIN JWANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
6 patentsUS5976264ANov 2, 1999
Removal of fluorine or chlorine residue by liquid CO2
IBM142 citations96
US5908510AJun 1, 1999
Residue removal by supercritical fluids
IBM206 citations96
US6294449B1Sep 25, 2001
Self-aligned contact for closely spaced transistors
IBM37 citations92
US5792275AAug 11, 1998
Film removal by chemical transformation and aerosol clean
IBM29 citations91
US6429067B1Aug 6, 2002
Dual mask process for semiconductor devices
IBM15 citations81
US5699679ADec 23, 1997
Cryogenic aerosol separator
IBM11 citations69