Inventor

JEON PYEONG SIK

KR2 patents

Patents

2 patents

US5827396AOct 27, 1998

Device for turning a wafer during a wet etching process

SAMSUNG ELECTRONICS CO LTD5 citations58

US6589360B2Jul 8, 2003

Drying system for drying semiconductor wafers and method of drying wafers using the same

SAMSUNG ELECTRONICS CO LTD0 citations44