P

Inventor

PUTKONEN MATTI

FI15 patents
⚠️ This page may combine multiple inventors who share the name “PUTKONEN MATTI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM INT

3 patents
US7754621B2Jul 13, 2010

Process for producing zirconium oxide thin films

ASM INT615 citations98
US7498272B2Mar 3, 2009

Method of depositing rare earth oxide thin films

ASM INT47 citations94
US7998883B2Aug 16, 2011

Process for producing zirconium oxide thin films

ASM INT26 citations92

UNIV OSLO

3 patents
USRE47325EMar 26, 2019

Formation of a lithium comprising structure on a substrate by ALD

UNIV OSLO3 citations69
USRE48853EDec 14, 2021

Formation of a lithium comprising structure on a substrate by ALD

UNIV OSLO0 citations59
USRE46610ENov 14, 2017

Formation of a lithium comprising structure on a substrate by ALD

UNIV OSLO1 citations59

ASM MICROCHEMISTRY OY

2 patents
US6777353B2Aug 17, 2004

Process for producing oxide thin films

ASM MICROCHEMISTRY OY129 citations98
US6548424B2Apr 15, 2003

Process for producing oxide thin films

ASM MICROCHEMISTRY OY285 citations98

ASM INTERNATIONAL NV

1 patent
US6858546B2Feb 22, 2005

Method of depositing rare earth oxide thin films

ASM INTERNATIONAL NV120 citations97

PUTKONEN MATTI

1 patent
US7351658B2Apr 1, 2008

Process for producing yttrium oxide thin films

PUTKONEN MATTI57 citations95

NILSEN OLA

1 patent
US8894723B2Nov 25, 2014

Formation of a lithium comprising structure on a substrate by ALD

NILSEN OLA11 citations79

ASM IP HOLDING BV

1 patent
US12509765B2Dec 30, 2025

Method and system for depositing transition metal carbide

ASM IP HOLDING BV0 citations57

RAJALA MARKKU

1 patent
US8758851B2Jun 24, 2014

Method for increasing the durability of glass

RAJALA MARKKU1 citations50

TEKNOLOGIAN TUTKIMUSKESKUS VTT OY

1 patent
US10500580B2Dec 10, 2019

Method for forming catalytic nanocoating

TEKNOLOGIAN TUTKIMUSKESKUS VTT OY0 citations45

JYLHÄ OLLI

1 patent
US8780314B2Jul 15, 2014

Strengthened structural module and method of fabrication

JYLHÄ OLLI0 citations20