Inventor
HASEGAWA HARUNARI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “HASEGAWA HARUNARI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS7072578B2Jul 4, 2006
Carbon wire heating object sealing heater and fluid heating apparatus using the same heater
TOKYO ELECTRON LTD44 citations95
US6903030B2Jun 7, 2005
System and method for heat treating semiconductor
TOKYO ELECTRON LTD26 citations92
US6885814B2Apr 26, 2005
Carbon wire heating object sealing heater and fluid heating apparatus using the same heater
TOKYO ELECTRON LTD36 citations91
USD932725SOct 5, 2021
Cart
TOKYO ELECTRON LTD6 citations81
USD923902SJun 29, 2021
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TOKYO ELECTRON LTD6 citations81
USD937526SNov 30, 2021
Cart
TOKYO ELECTRON LTD2 citations70
US11114318B2Sep 7, 2021
Assembling apparatus and assembling method for semiconductor manufacturing apparatus
TOKYO ELECTRON LTD0 citations59
US10518986B2Dec 31, 2019
Method for conveying reaction tube unit
TOKYO ELECTRON LTD0 citations47