Inventor
LEE BYUNG-AM
KR7 patents
Patents
7 patentsUS6528333B1Mar 4, 2003
Method of and device for detecting micro-scratches
SAMSUNG ELECTRONICS CO LTD28 citations91
US6449037B2Sep 10, 2002
Method of and device for detecting micro-scratches
SAMSUNG ELECTRONICS CO LTD19 citations91
US5953579ASep 14, 1999
In-line test of contact opening of semiconductor device
SAMSUNG ELECTRONICS CO LTD11 citations71
US7235411B2Jun 26, 2007
Method for aligning a wafer and apparatus for performing the same
SAMSUNG ELECTRONICS CO LTD3 citations59
US7155366B2Dec 26, 2006
Apparatus and method for inspecting patterns on wafers
SAMSUNG ELECTRONICS CO LTD3 citations59
US7339663B2Mar 4, 2008
Method and apparatus for classifying repetitive defects on a substrate
SAMSUNG ELECTRONICS CO LTD5 citations57
US7205543B2Apr 17, 2007
Auto focusing apparatus and method
SAMSUNG ELECTRONICS CO LTD1 citations51