Inventor
AHN BYUNG-SEOL
KR5 patents
Patents
5 patentsUS6043502AMar 28, 2000
Apparatus and method for sensing an insertion state of a wafer in a cassette
SAMSUNG ELECTRONICS CO LTD26 citations89
US5654205AAug 5, 1997
Apparatus and method for depositing particles onto a wafer
SAMSUNG ELECTRONICS CO LTD5 citations71
US5746832AMay 5, 1998
Apparatus for depositing particles onto a wafer
SAMSUNG ELECTRONICS CO LTD3 citations60
US7155366B2Dec 26, 2006
Apparatus and method for inspecting patterns on wafers
SAMSUNG ELECTRONICS CO LTD3 citations59
US7339663B2Mar 4, 2008
Method and apparatus for classifying repetitive defects on a substrate
SAMSUNG ELECTRONICS CO LTD5 citations57