Inventor

CHO JAE-SUN

KR2 patents

Patents

2 patents

US7155366B2Dec 26, 2006

Apparatus and method for inspecting patterns on wafers

SAMSUNG ELECTRONICS CO LTD3 citations59

US7339663B2Mar 4, 2008

Method and apparatus for classifying repetitive defects on a substrate

SAMSUNG ELECTRONICS CO LTD5 citations57