Inventor
KIM JOO-WOO
KR3 patents
Patents
3 patentsUS7289661B2Oct 30, 2007
Apparatus and method for inspecting a substrate
SAMSUNG ELECTRONICS CO LTD5 citations61
US7235411B2Jun 26, 2007
Method for aligning a wafer and apparatus for performing the same
SAMSUNG ELECTRONICS CO LTD3 citations59
US7155366B2Dec 26, 2006
Apparatus and method for inspecting patterns on wafers
SAMSUNG ELECTRONICS CO LTD3 citations59