Inventor
PARK BYONG-CHEOL
KR3 patents
Patents
3 patentsUS7155915B2Jan 2, 2007
Temperature controller for a semiconductor-fabricating tool
SAMSUNG ELECTRONICS CO LTD5 citations60
US7417709B2Aug 26, 2008
Method and apparatus for exposing semiconductor substrates
SAMSUNG ELECTRONICS CO LTD2 citations57
US7265818B2Sep 4, 2007
Method of exposing a wafer to a light, and reticle, reticle assembly and exposing apparatus for performing the same
SAMSUNG ELECTRONICS CO LTD0 citations50